Quorum Technologies own the Polaron brand and in early 2006 they also purchased Emitech. ProSciTech is now the sole distributor for these three brands in Australasia, south of Singapore. In time, the instrument range may be rationalised, but at present all competing products of these brands are available and featured on our site. Some additional data may be available from www.quorumtech.com.
Warranty:
Quorum Technologies offer a standard 12 months warranty on all instruments. This can be extended to 3 years by filling in and returning the registration form. Pumps are excluded from the extension.
All sputter coaters require an appropriately sized, two stage mechanical pump. We recommend and supply Edwards pumps (THE British pump manufacturer). These pumps are available from us as an RV3 and a RV5 pump with 3.3 and 5.1 cubic metre/hour capacity. The RV3, because of contract arrangement, is our best buy. This pump is also the best size for SEM, TEM, evaporators and is very fast on sputter coaters and other preparation equipment and for the evacuation of refrigeration/ air-conditioning systems. Within Australia and New Zealand we can supply these superior pumps most competitively.
Turbo pumped instruments include the turbo pump, but require a mechanical pump.
Note: A larger diaphragm pump is available in the Emitech range, see below. However, it should be noted that larger diaphragm pumps, when compared with rotary pumps (also called mechanical or fore-pumps) are a little noisier, require a little more maintenance, do not achieve as good an ultimate vacuum and are more expensive. The advantage of being totally oil-free remains and it is known that rotary pump oil can contaminate a system, streaming past the diffusion pump. The argument for a diaphragm pump backing of a turbo-molecular pump is weak, since that pump's action scarcely allows oil vapour into the pumped space.
For small Diaphragm Vacuum Pumps, which provide a lesser vacuum, but are oil free and excellent for pumping "wet" materials, see page V2.
For more information ask
AUTO VACUUM SHUTDOWN
This feature allows the instrument to be pumped down and the chamber left under vacuum. It uses two valves, one valve is fitted after the turbo pump to isolate the chamber, and the other is fitted to the line between the isolating valve and the rotary pump. This is to allow the rotary pump to vent so that there is no risk of oil being sucked back.
This instrument feature is now a standard fitting for K675X and K975X. The Vacuum Shutdown is also an option for the K575X and the K950X.
K4225 Auto vacuum shutdown - ask
TURBOMOLECULAR PUMPS
All of our turbomolecular units are fitted with the BOC Edwards EXT70H Turbomolecular Pumping system as standard.
The turbomolecular pump is optimized for molecular flow conditions and requires a suitably sized two stage rotary vane pump or an oil free scroll pump (see below) to exhaust to atmosphere.
The design allows for high critical foreline pressures (typically up to 10 mbar) and options to use smaller backing pumps or dry diaphragm backing pumps.
TWO STAGE ROTARY PUMPS
Emitech use the BOC Edwards RV series of Rotary Vane Pumps. Unique in their capacity to dispatch high or low throughputs with high ultimate vacuum, they are the ideal choice for a wide range of applications and environments, together with low noise levels. All of the following Rotary Pumps are available as a primary pump or as a back up option for our turbomolecular units.
Key Features:
- 48 dBA
- Intrusive frequencies minimised
- Dual Mode
- Fast acting inlet valve for system protection
- High torque, dual voltage/dual frequency motor
No 3 Two Stage Rotary Pump
In high vacuum mode it is ideal for backing turbo pumps, analytical instruments, and electron microscopes. Configurable for high throughput mode.
- Speed - (Pneurop 6602)
- 50 Hz operation - 2 ft³min-1 (3.3 m³h-1)
- 60 Hz operation - 2.3 ft³min-1 (3.9 m³h-1)
- Ultimate Vacuum (Total Pressure) - High Vacuum Mode - 2 x 10-3 mbar
- Inlet connection - NW25
Electrical supply
- 1-phase - 220-240 V, 50 or 60 Hz
- 3-phase - 200-230 V or 380-460 V, 50 or 60 Hz
K3175 Edwards RV3, No. 3, two stage, mechanical pump (3.3m³/h) See technical data and ordering details below.
Recommended model for these Emitech instruments: K450/ K500/ k550/ K575/ K650T/ K675/ K695/ K775/ K950/ K975/ K1150.
K3176 Edwards RV3F, No. 3, two stage, mechanical pump (Fomblin filled) (3.3m³/h) - ask
Recommended model for the Emitech instrument: K1050x
No 5 Two Stage Rotary Pump
Its exclusive dual-mode action lets the user easily configure the unit, to pump very high gas loads and accomplish excellent vacuum – all from a single pump.
- Speed - (Pneurop 6602)
- 50 Hz operation - 3 ft³min-1 (5.1 m³h-1)
- 60 Hz operation - 3.6 ft³min-1 (6.2 m³h-1)
- Ultimate Vacuum (Total Pressure) - High Vacuum Mode - 2 x 10-3 mbar
- Inlet connection - NW25
Electrical supply
- 1-phase - 220-240 V, 50 or 60 Hz
- 3-phase - 200-230 V or 380-460 V, 50 or 60 Hz
K3180 Edwards RV5, No. 5, two stage, mechanical pump (10m³/h) - ask
Recommended model for these Emitech instruments: K650/ K750/ K1250
No 12 Two Stage Rotary Pump
A high performance pump with a wide performance envelope that's quiet and easy to maintain.
- Speed - (Pneurop 6602)
- 50 Hz operation - 7.1 ft³min-1 (12.0 m³h-1)
- 60 Hz operation - 8.4 ft³min-1 (14.2 m³h-1)
- Ultimate Vacuum (Total Pressure) - High Vacuum Mode - 2 x 10-3 mbar
- Inlet connection - NW25
Electrical supply
- 1-phase - 220-240 V, 50 or 60 Hz
- 3-phase - 200-230 V or 380-460 V, 50 or 60 Hz
K3185 Edwards RV12, No. 12, two stage, mechanical pump - ask
This model is optional for all units.
2 stage rotary pump
Technical Data for the Edwards RV3, two stage, mechanical pump
Note: Cycles (Hz) affects motor speed and therefore pump performance. This data is for the 220/240V at 50Hz version.
Displacement(swept volume)m³h-¹ 50Hz----------------3.7 Speed(Pneurop)m³h-¹ 50Hz----------------3.3 Ultimate vacuum (total pressure) robar - high vacuum mode gas ballast 0----------------2x10-³ gas ballast 1----------------3x10-² gas ballast 2----------------1.2x10-¹ Ultimate vacuum (total pressure) mbar - high throughput mode gas ballast 0----------------3x10-² gas ballast 1----------------6x10-² gas ballast 2----------------1.2x10-¹ Ultimate vacuum (partial pressure) mbar - high throughput mode gas ballast 0----------------10-4 Maximum water vapour pumping rate kgh-¹ 1ph (3ph) gas ballast 1----------------0.06(0.04) gas ballast 2----------------0.22(0.12) Maximum permitted pressure at outlet - bar gauge Inlet connection----------------NW25 Outlet connection----------------NW25 Max. weight kg (without oil)----------------21.6 Noise dB (A) 50Hz 1ph----------------48 Motor power (W) 50Hz----------------250 Oil Capacity (litre) max.----------------0.7 Oil Capacity (litre) min.----------------0.42K3175 Edwards RV3, No. 3, two stage, mechanical pump ask stock?
K3175
THREE-STAGE DIAPHRAGM PUMP
A totally oil free, mechanical vacuum pump.
Optimized kinetics for minimum work and wear of the diaphragm result in high reliability, low scuffing, long life and low noise level of the diaphragm.
The Three Stage Diaphragm Pump from Vaccubrand offers a low ultimate vacuum (absolute) 1.5 mbar
This pump is available for all turbo-driven instruments for a completely oil-free system.
K3170 Diaphragm pump, oil free (35L/min) ask stock?
A totally oil free, mechanical vacuum pump.
Optimized kinetics for minimum work and wear of the diaphragm result in high reliability, low scuffing, long life and low noise level of the diaphragm.
The Three Stage Diaphragm Pump from Vaccubrand offers a low ultimate vacuum (absolute) 1.5 mbar
- Volume flow rate m³/h (50/60 Hz) - 1.2 / 1.4
- Motor power kW - 0.08
This pump is available for all turbo-driven instruments for a completely oil-free system.
K3170 Diaphragm pump, oil free (35L/min) ask stock?
K3170
XDS RANGE OF DRY SCROLL PUMPS
The XDS is a completely dry, lubricant-free vacuum pump with vapour handling. It overcomes problems associated with other scroll pumps such as reliability, cleanliness, servicing, shaft seal wear and vapour handling. Designed by BOC Edwards to provide vacuum totally free of lubricants Emitech offer XDS5 & XDS10 Scroll Pumps as a back up option for the turbomolecular pumped units or as a primary pumping system.
XDS5 Dry Scroll Pump
This pump is portable, air-cooled and cost effective. Power consumption is very low and, typically, no other utilities are required.
Peak pumping speed
Electrical Supply
K3171 XDS5 Dry scroll pump - ask
XDS10 Dry Scroll Pump
Truly user serviceable; with no oil to change, annual maintenance can be completed typically in about 10 minutes without special tools.
Peak pumping speed
Electrical Supply
The XDS is a completely dry, lubricant-free vacuum pump with vapour handling. It overcomes problems associated with other scroll pumps such as reliability, cleanliness, servicing, shaft seal wear and vapour handling. Designed by BOC Edwards to provide vacuum totally free of lubricants Emitech offer XDS5 & XDS10 Scroll Pumps as a back up option for the turbomolecular pumped units or as a primary pumping system.
XDS5 Dry Scroll Pump
This pump is portable, air-cooled and cost effective. Power consumption is very low and, typically, no other utilities are required.
Peak pumping speed
- 50 Hz operation - 4.8 m³h-1 (2.8 ft³min-1)
- 60 Hz operation - 6.0 m³h-1 (3.5 ft³min-1)
- Ultimate vacuum (total pressure) - 1 x 10-2 torr
- Inlet connection - NW25
Electrical Supply
- 1-phase - 110 V or 220-240 V (50 Hz), 115-120 V or 230-240 V (60 Hz)
- 3-phase - 200-220 V or 380-415 V (50 Hz), 200-230 V or 460 V (60 Hz)
K3171 XDS5 Dry scroll pump - ask
XDS10 Dry Scroll Pump
Truly user serviceable; with no oil to change, annual maintenance can be completed typically in about 10 minutes without special tools.
Peak pumping speed
- 50 Hz operation - 9.3 m³h-1 (4.0 ft³min-1)
- 60 Hz operation - 11.1 m³h-1 (6.5 ft³min-1)
- Ultimate vacuum (total pressure) - (7 ´ 10-2 mbar)
- Inlet connection - NW25
Electrical Supply
- 1-phase - 110 V or 220-240 V (50 Hz) 115-120 V or 230-240 V (60 Hz)
- 3-phase - 200-220 V or 380-415 V (50 Hz) 200-230 V or 460 V (60 Hz)
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