Quorum Technologies own the Polaron brand and in early 2006 they also purchased Emitech. ProSciTech is now the sole distributor for these three brands in Australasia, south of Singapore. In time, the instrument range may be rationalised, but at present all competing products of these brands are available and featured on our site. Some additional data may be available from www.quorumtech.com.
Warranty:
Quorum Technologies offer a standard 12 months warranty on all instruments. This can be extended to 3 years by filling in and returning the registration form. Pumps are excluded from the extension.
SPUTTER COATERS
Quorum/EMITECH's range of sputter coaters includes the K575X , K650X , K675X and K695X . The K695X is able to coat single 12" wafers in one operation, and with its unique sputtering arm can sputter two different target materials sequentially.
FAQ: How to mount targets in a sputter coater
Most targets are held by a cover or crimped around the edge - if yours is not that type it must be glued.
'Glue' used must be electrically conducting.
For 'professional' mounting use a few slivers of indium wire on the support plate, cover with the target and then either place in an oven with a flat weight on top of the target or use a smoothing iron to heat the gold and hence melt the indium. Placing something like a piece of lens tissue onto the target would protect it.
For a short time a temperature a little higher than melting point of Indium is required; m.p. 156.6ºC.
Alternatively use a bit of silver conducting paint, best find a few small drops of paste at the bottom of the jar.
You could also make a paste using our silver powder and a little commercial epoxy glue - method under Silver powder C920 on page C8. Only spot gluing is required, but keep a weight on the target while drying/ curing.
All models have full digital equipment control, with easy to read LCD display and menu driven operation
Quorum/EMITECH's range of sputter coaters includes the K575X , K650X , K675X and K695X . The K695X is able to coat single 12" wafers in one operation, and with its unique sputtering arm can sputter two different target materials sequentially.
These units are all benchtop units utilising magnetron target assemblies. The magnetron
target assembly enhances the efficiency of the process using low
voltages and results in fine grain and cool sputtering.
All units are designed with an integrated
panel and plug-in electronics to maximise up-time. All systems
are engineered for easy operation and they are well suited for multi-user
environments. The independent rotary pumps are controlled by
the instruments throughout the process.
The K575X uses a 'Turbo' pump, backed up by a Rotary Vacuum pump, the
complete pumping sequence being under automatic control, the vacuum in the
order of 1 x 10 -3 mbar.
The twin head version of the above, the K575d has two sputter heads. These are
arranged such that, for special coating applications, two sequential layers of a
target material can be deposited without breaking the vacuum seal in this automatic
unit.
The K675 system employs a magnetron target assembly which enhances the
efficiency of the process using low voltages, and giving a fine grain, cool
sputtering. There are three such target assemblies in the K675X, positioned to give coating over a
large diameter which, together with a rotating sample table, ensures even
depositions. This method allows standard targets to be utilised, and avoids the necessity of
special large profile targets.
The triple-target system is particularly useful in the semi-conductor wafer
industry. It has a turbomolecular pump backed by a rotary vacuum pump.
The integrated instrument panel and plug-in electronics maximise 'up-time' and,
with user friendly designs, ensures satisfactory multi-user discipline.
The sputtering parameters can be pre-set, including the gas bleed needle valve
which has electromagnetic valve back-up.
The independent vacuum pump is controlled by the instrument throughout the
fully automatic coating cycle.
It can be used to sputter coat targets such as gold, and also targets that may
need pre-cleaning, or the removal of oxide layers such as chromium.
A shutter assembly is fitted as standard which allows a sputter cleaning and
the sputter cycle to be carried out while maintaining the vacuum.
Notes on SPUTTER COATING
When a glow discharge is formed between a Cathode and Anode
using a suitable gas (typically Argon), and Cathode target
material (commonly Gold) the bombardment of the target with
gas ions will erode this target material, this process being
termed "Sputtering".
The resulting omni-directional deposition of sputtered atoms
will form an even coating on the surface of the specimen,
normally located on the stage (anode) of the instrument. This
electrically conductive thin coating will be representative
of the surface of the specimen. It will inhibit charging,
reduce thermal damage, and improve secondary electron
emission which are beneficial for Scanning Electron
Microscopy.
FAQ: How to mount targets in a sputter coater
Most targets are held by a cover or crimped around the edge - if yours is not that type it must be glued.
'Glue' used must be electrically conducting.
For 'professional' mounting use a few slivers of indium wire on the support plate, cover with the target and then either place in an oven with a flat weight on top of the target or use a smoothing iron to heat the gold and hence melt the indium. Placing something like a piece of lens tissue onto the target would protect it.
For a short time a temperature a little higher than melting point of Indium is required; m.p. 156.6ºC.
Alternatively use a bit of silver conducting paint, best find a few small drops of paste at the bottom of the jar.
You could also make a paste using our silver powder and a little commercial epoxy glue - method under Silver powder C920 on page C8. Only spot gluing is required, but keep a weight on the target while drying/ curing.
All models have full digital equipment control, with easy to read LCD display and menu driven operation
Turbo versus diffusion pumped coating systems
High vacuum sputter coaters and vacuum evaporators commonly use an oil diffusion pump or a turbomolecular pump, both are backed by a two-stage rotary vane pump. A turbo pumped system should not be compared with a diffusion pumped system. Turbos are more expensive to purchase, but they require virtually no maintenance, don't allow oil vapour from the backing pump into the working chamber, use much less electric power and require no cooling water. Diffusion pumped systems should be phased out - why would anybody purchase a new one?
High vacuum sputter coaters and vacuum evaporators commonly use an oil diffusion pump or a turbomolecular pump, both are backed by a two-stage rotary vane pump. A turbo pumped system should not be compared with a diffusion pumped system. Turbos are more expensive to purchase, but they require virtually no maintenance, don't allow oil vapour from the backing pump into the working chamber, use much less electric power and require no cooling water. Diffusion pumped systems should be phased out - why would anybody purchase a new one?
COMPACT SPUTTER COATER - Polaron KSC7620
The KSC7620 is a compact, robust, simple to operate SEM sputter coater. Combined with the optional carbon attachment (CA7615 and CA0762F) it makes an ideal low cost SEM sputtering and carbon package. Manual only.
Features:
Optional Accessories
Specifications
KSC7620 Polaron compact sputter coater ask stock?
The KSC7620 is a compact, robust, simple to operate SEM sputter coater. Combined with the optional carbon attachment (CA7615 and CA0762F) it makes an ideal low cost SEM sputtering and carbon package. Manual only.
Features:
- Rapid cycle time (typically 2-3minutes)
- Magnetic deflection head
- Carbon fibre evaporation option
- Quick change targets
- Adjustable height stage
- Built to latest safety standards
Optional Accessories
- EK3175 Rotary pump - Edwards RV350L/M + advanced oil mist filter
- SC7625-CF / CA7625F - Carbon fibre evaporation attachment (SC7620-CF)
Specifications
KSC7620 Polaron compact sputter coater ask stock?
CARBON EVAPORATION
The use of carbon films on TEM specimen grids or as carbon coatings is common in electron microscopy. These films add little to the background signal and they have relatively good electrical conductivity. Thin films (5 nanometres) are used in TEM to stabilise some specimens. Thicker films (up to 30 nanometres) may be used for TEM support films and in SEM for X-Ray microanalysis. Commonly, a high vacuum evaporator with carbon rods is used to produce these coatings and this system is preferred for some applications. The use of carbon fibre, has allowed a flash evaporation technique, which is suitable for many general EM requirements. Quorum manufactures a range of evaporators to meet all needs. Carbon coatings produced in high vacuum have a finer grain and these are preferred for some TEM applications; flash evaporated carbon is used for conventional SEM and EDS /WDS. Carbon fibre must be used in the low vacuum, rotary vane pump only. For high vacuum system carbon/graphite rods are preferable.
The use of carbon films on TEM specimen grids or as carbon coatings is common in electron microscopy. These films add little to the background signal and they have relatively good electrical conductivity. Thin films (5 nanometres) are used in TEM to stabilise some specimens. Thicker films (up to 30 nanometres) may be used for TEM support films and in SEM for X-Ray microanalysis. Commonly, a high vacuum evaporator with carbon rods is used to produce these coatings and this system is preferred for some applications. The use of carbon fibre, has allowed a flash evaporation technique, which is suitable for many general EM requirements. Quorum manufactures a range of evaporators to meet all needs. Carbon coatings produced in high vacuum have a finer grain and these are preferred for some TEM applications; flash evaporated carbon is used for conventional SEM and EDS /WDS. Carbon fibre must be used in the low vacuum, rotary vane pump only. For high vacuum system carbon/graphite rods are preferable.
ROTARY PUMPED SPUTTER COATER/ CARBON EVAPORATOR
KQ150R is a compact rotary pumped coating system ideally suited for SEM and other coating applications. This product replaces previous models K400X/450X and K500X/550X.
KQ150R is available in 3 formats:
KQ150R-S – compact rotary pumped sputter coater, suitable for non-oxidising metals
KQ150R-E – compact rotary pumped carbon fibre coater suitable for SEM applications
KQ150R-ES – compact rotary pumped combined sputter coater and carbon evaporator
Features
More information & technical specifications
KQ150R-S Sputter coater, rotary vane pumped ask stock?
KQ150R-E Carbon evaporator, rotary vane pumped ask stock?
KQ150R-ES Combination sputter coater & carbon evaporator, rotary vane pumped ask stock?
KQ150R is a compact rotary pumped coating system ideally suited for SEM and other coating applications. This product replaces previous models K400X/450X and K500X/550X.
KQ150R is available in 3 formats:
KQ150R-S – compact rotary pumped sputter coater, suitable for non-oxidising metals
KQ150R-E – compact rotary pumped carbon fibre coater suitable for SEM applications
KQ150R-ES – compact rotary pumped combined sputter coater and carbon evaporator
Features
- Metal sputtering or carbon evaporation - or both – in one space saving design
- Rotary pumped sputter coating – allows sputtering of a wide range of non-oxidising (noble) metals, such as gold (Au), platinum (Pt), silver (Ag) and palladium (Pd)
- Carbon fibre coating – ideal for SEM carbon coating applications (eg EDS and WDS)
- Advanced design carbon evaporation gun – simple operation, reproducible results
- Glow discharge option – for modification of sample surface properties (eg hydrophobic to hydrophilic conversion) or for cleaning / removal of contaminating surface residues
- Control of evaporation current profile – ensures consistently reproducible carbon films
- Repeatable thickness control using the film thickness monitor option
- Fully automatic touch screen control – rapid data input, simple operation
- Multiple, customer defined coating protocols can be stored – ideal for multi-user labs
- Automatic vacuum control, which can be pre-programmed to suit the process and material – no needle valve to adjust
- 'Intelligent' recognition system – automatically detects the type of coating insert fitted
- Easy-to-change, drop-in style specimen stages (rotation stage as standard)
- Thick film capabilities – up to 60 minutes sputtering time without breaking vacuum
- Ergonomic one piece moulded case – easy maintenance and service access
- Ethernet with local FTP server connection – simple programmer updates
- Power factor correction – complies with current legislation (CE Certification) – efficient use of power means reduced running costs
- Three-year warranty
More information & technical specifications
KQ150R-S Sputter coater, rotary vane pumped ask stock?
KQ150R-E Carbon evaporator, rotary vane pumped ask stock?
KQ150R-ES Combination sputter coater & carbon evaporator, rotary vane pumped ask stock?
KQ150R-ES in sputtering mode (fitted with optional FTM)
CARBON COATING ATTACHMENTS
K250X is discontinued.
Sputter coaters and their carbon coating attachments:
Ask for a quote.
K250X is discontinued.
Sputter coaters and their carbon coating attachments:
K500X, K550X = KSC7640-CR carbon rod attachment, KSC7640-CF carbon fibre attachment
K575X, K575XD = KSC7640-CR carbon rod attachment, KSC7640-CF carbon fibre attachment
KSC7620 = KSC7625-CF, KCA7625F carbon fibre attachment
KSC7640 = KSC7640-CR carbon rod attachment
KSC7680 = KSC7640-CR carbon head 1 gun, KCA078R/2P 2 gun, KCA078R/3P 3 gun
Ask for a quote.
FILM THICKNESS MONITOR - EMITECH K150X & KC5450
Specification:
Note: This crystal suits all Emitech FTMs.
K150P Plug In Module is suitable for use with the K575X, K675X, K975X
K150M Module is suitable for use with the K500X, K550X, K650X
K150X Film thickness monitor ask stock?
KC5450 Film thickness monitor crystal AUD95.00 stock?
This optional accessory is used to determine the thickness of
material deposited and may be used to terminate coating at a pre-set thickness.
The K150X consists of a Control Unit external to the
instrument and a Crystal Holder with an Interconnection Lead
and Pre-Amplifier.
In addition, it has a vacuum collar to suit the appropriate
Instrument Chamber.
The quartz crystal is placed in the vacuum work chamber. One
face of the crystal is exposed towards the deposition source,
such that, as material is deposited it will coat the crystal.
The crystal is connected via a vacuum feed through to
external components, the system functions as an oscillator, whose
output is controlled by the frequency of crystal oscillation.
As material is deposited on the crystal, so its frequency is modified.
Features:
- Terminate Facility
- Pre-selectable Material Density
- Programmable ‘Tooling Factor’
- Microprocessor Controlled
- Clean Line Design
- Automatic or Manual Mode
- Back Lit L.C.D. Display
- Pre Set Programme Memory Storage
Specification:
- Instrument Case - 300mm W x 140mm D x 40mm H
- Weight - 2Kg
- Crystal Holder - Exchange Crystal Facility.
- Density Range - To 23.0g/cm3
- Measurement Range - To 999nm.
- Resolution - 0.1nm.
- Electrical Supply - 230 Volts 50Hz (1 amp Max.)
- Film thickness monitor crystal notes
Note: This crystal suits all Emitech FTMs.
K150P Plug In Module is suitable for use with the K575X, K675X, K975X
K150M Module is suitable for use with the K500X, K550X, K650X
K150X Film thickness monitor ask stock?
KC5450 Film thickness monitor crystal AUD95.00 stock?
K150X
Rotating and more complex Specimen Stages
Rotation of specimens during evaporation or sputtering increases uniformity of coatings and this is often a desirable feature, even with flat specimens.
Most Emitech coaters are supplied with a rotating stage, which also allows setting the angle of tilt prior to evacuation. For Emitech instruments there is a choice of several more complex stages as optional extras
Stage Type
Suited to these models:
As an example, here are the features of the Standard Planetary Stage (fixed angle 45 degrees). This stage was developed for the K950X, but customers with severe coating problems discovered they could use in the K550X and Emitech have adapted it for that use.
The stage holds 6 samples, with the tilt fixed at about approx 45 degrees. During coating, the samples rotate in relation to the central axis.
Each planet is bored to hold 3.2mm pin mounts, 1/4 inch pin mount and 15mm diameter mounts.
The K950X and K550X readily accept this stage.
Rotation of specimens during evaporation or sputtering increases uniformity of coatings and this is often a desirable feature, even with flat specimens.
Most Emitech coaters are supplied with a rotating stage, which also allows setting the angle of tilt prior to evacuation. For Emitech instruments there is a choice of several more complex stages as optional extras
Stage Type
Suited to these models:
- Heated Stage (Fixed Stage) - K575X, K575d, K950X
- Rotate/Oscillate Stage - K550X, K575X, K650X, K675X, K950X
- Rotate/Tilt Stage - K650X, K675X
- Rotating Stage, Planetary, Ext. Tilt - K975X
- Standard Planetary Stage (fixed angle 45 degree) - K950X, K550X
- Variable Speed, Planetary Stage with External Tilt - K950X
As an example, here are the features of the Standard Planetary Stage (fixed angle 45 degrees). This stage was developed for the K950X, but customers with severe coating problems discovered they could use in the K550X and Emitech have adapted it for that use.
The stage holds 6 samples, with the tilt fixed at about approx 45 degrees. During coating, the samples rotate in relation to the central axis.
Each planet is bored to hold 3.2mm pin mounts, 1/4 inch pin mount and 15mm diameter mounts.
The K950X and K550X readily accept this stage.
GLASS CYLINDERS FOR SPUTTER COATERS AND VACUUM EVAPORATORS
These replacement glass cylinders and L gaskets suit any sputter coater or vacuum evaporator requiring the listed dimensions.
Eg.
KG6260 fits K450X, K550X, K575X, K950X and KQ150T
KG6262 fits K650X
KG6260 Glass cylinder OD165 x H127mm AUD335.00 stock?
KG6261 L gaskets to fit OD165mm cylinder AUD113.00 /pk/2 stock?
KG6262 Glass cylinder OD229 x ID216 x H127mm AUD776.00 stock?
KG6263 L gaskets to fit OD229mm cylinder AUD392.00 /pk/2 stock?
These replacement glass cylinders and L gaskets suit any sputter coater or vacuum evaporator requiring the listed dimensions.
Eg.
KG6260 fits K450X, K550X, K575X, K950X and KQ150T
KG6262 fits K650X
KG6260 Glass cylinder OD165 x H127mm AUD335.00 stock?
KG6261 L gaskets to fit OD165mm cylinder AUD113.00 /pk/2 stock?
KG6262 Glass cylinder OD229 x ID216 x H127mm AUD776.00 stock?
KG6263 L gaskets to fit OD229mm cylinder AUD392.00 /pk/2 stock?
Glass cylinder and gaskets
| 
|
